Diameter: | 14.90" | ![]() |
Length: | 16.20" | |
Substrate Opening: | 7.0" | |
Target Dimensions: | ||
Length: | 8.125" | |
Diameter: | 13.50" | |
Cooling H2O: | 2 GPM | |
Operating Pressure: | .5mTorr to 20mTorr | |
Max Continuous Power: | 5kW DC |
Diameter: | 14.90" | ![]() |
Length: | 16.20" | |
Substrate Opening: | 7.0" | |
Target Dimensions: | ||
Length: | 8.125" | |
Diameter: | 13.50" | |
Cooling H2O: | 2 GPM | |
Operating Pressure: | .5mTorr to 20mTorr | |
Max Continuous Power: | 5kW DC |