Diameter: | 5.50" | ![]() |
Length: | 7.80" | |
Substrate Opening: | .75" | |
Target Dimensions: | ||
Length: | 6.5" | |
Diameter: | 2.0" | |
Cooling H2O: | 1 GPM | |
Operating Pressure: | .5mTorr to 20mTorr | |
Max Continuous Power: | 2kW DC |
Diameter: | 5.50" | ![]() |
Length: | 7.80" | |
Substrate Opening: | .75" | |
Target Dimensions: | ||
Length: | 6.5" | |
Diameter: | 2.0" | |
Cooling H2O: | 1 GPM | |
Operating Pressure: | .5mTorr to 20mTorr | |
Max Continuous Power: | 2kW DC |