| Diameter: | 5.50" |  |
| Length: | 7.80" | |
| Substrate Opening: | .75" | |
| Target Dimensions: | ||
| Length: | 6.5" | |
| Diameter: | 2.0" | |
| Cooling H2O: | 1 GPM | |
| Operating Pressure: | .5mTorr to 20mTorr | |
| Max Continuous Power: | 2kW DC |
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Isoflux
Isoflux Incorporated
PO Box 190
Pittsford, NY 14534
PO Box 190
Pittsford, NY 14534
Phone: +1 (585) 641-0641
