When the surface really matters

Standard Cylindrical Magnetron Model 522 UHV

Diameter: 6.5" Model 522 UHV
Length: 18.4"
Substrate Opening: .75"
Target Dimensions:  
Length: 8.5"
Diameter: 2.0"
Cooling H2O: 2 GPM
Operating Pressure: .5mTorr to 20mTorr
Max Continuous Power: 5kW DC

* Model 522 UHV is designed to be integrated into the vacuum system in an in-line fashion.  Both ends of the cathode connect to other system components with 4 1/2" metal seal flanges.  The materials in th Model 522 UHV are ultra-high vacuum compatible and bakable to 400 c.