Diameter: | 30.0" | |
Length: | 7.8" | |
Substrate Opening: | 0" | |
Target Dimensions: | ||
Length: | 24.25" | |
Diameter: | 7.0" | |
Cooling H2O: | 5 GPM | |
Operating Pressure: | .5mTorr to 20mTorr | |
Max Continuous Power: | 6kW DC |
Diameter: | 30.0" | |
Length: | 7.8" | |
Substrate Opening: | 0" | |
Target Dimensions: | ||
Length: | 24.25" | |
Diameter: | 7.0" | |
Cooling H2O: | 5 GPM | |
Operating Pressure: | .5mTorr to 20mTorr | |
Max Continuous Power: | 6kW DC |